Terraced substrate semiconductor laser

Coherent light generators – Particular active media – Semiconductor

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Details

357 17, H01S 319

Patent

active

043922287

ABSTRACT:
A terraced semiconductor laser comprising semiconductor layers (10, 11, 12) including an active layer (11) formed on a terraced semiconductor substrate (9) in a manner to have an inclined part (111) ranging from the position above said step to the part shifted to the side of said thinner part,
an overriding layer (13) having the opposite conductivity type to that of the uppermost layer (12) of said semiconductor layers (10, 11, 12) and formed on said uppermost layer (12),
characterized by further comprising:
a last layer (14) having the same conductivity type to that of the overriding layer (13) formed on the latter layer (13),
said last layer (14) having a stripe-shaped through-opening (141) at the position which is a shifted position from the part immediately above said inclined part 111, thereby exposing a surface of said overriding layer (13) at the bottom of the through-opening (141),
a conduction region (15) formed at least on the bottom and side faces of said stripe-shaped opening, in a manner to reach and contact said uppermost layer (12),
a first electrode layer formed to contact to said conduction layer in said through-opening and
a second electrode formed on the bottom face of said terraced semiconductor substrate. Short-circuiting of p-n junction is eliminated by the improved structure.

REFERENCES:
patent: 4329661 (1982-05-01), Sugino et al.

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