Chemistry: molecular biology and microbiology – Animal cell – per se ; composition thereof; process of... – Solid support and method of culturing cells on said solid...
Reexamination Certificate
2007-08-28
2007-08-28
Hoang, Quoc (Department: 2818)
Chemistry: molecular biology and microbiology
Animal cell, per se ; composition thereof; process of...
Solid support and method of culturing cells on said solid...
C438S669000, C257S300000, C257SE21646, C257SE27084
Reexamination Certificate
active
11158220
ABSTRACT:
A process and apparatus directed to forming a terraced film stack of a semiconductor device, for example, a DRAM memory device, is disclosed. The present invention addresses etch undercut resulting from materials of different etch selectivity used in the film stack, which if not addressed can cause device failure.
REFERENCES:
patent: 2004/0253813 (2004-12-01), Son et al.
patent: 2005/0014334 (2005-01-01), Herner et al.
Hanson Robert J.
McDaniel Terry
Schrinsky Alex
Dinsmore & Shohl LLP
Hoang Quoc
Micro)n Technology, Inc.
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