Terpolymers containing organosilicon side chains

Details Terpolymers containing organosilicon side chains Terpolymers containing organosilicon side chains

1996-07-16

1999-03-23

Henderson, Christopher

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Polymers from only ethylenic monomers or processes of...

526270, 526279, C08F 2400

Patent

active

058861190

ABSTRACT:
A terpolymer containing 20 to 70 mole percent of an acid labile repeating unit, 3 to 40 mole percent of an acrylic acid or acrylonitrile based repeating unit and a repeating unit containing silicon side chains. The silicon side chain repeating unit is provided in sufficient amounts so that the terpolymer silicon content is 7 to 20 weight percent. The terpolymer is used primarily in the formulation of multilayer positive operating photoresists.

REFERENCES:
patent: 5102771 (1992-04-01), Vogel
patent: 5369200 (1994-11-01), Schaedeli et al.
patent: 5552260 (1996-09-01), Vogel

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