Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – Polymers from only ethylenic monomers or processes of...
Patent
1998-10-26
2000-02-22
Lipman, Bernard
Synthetic resins or natural rubbers -- part of the class 520 ser
Synthetic resins
Polymers from only ethylenic monomers or processes of...
526270, 526279, C08F 2400
Patent
active
060281545
ABSTRACT:
A terpolymer containing 20 to 70 mole percent of an acid labile repeating unit, 3 to 40 mole percent of an acrylonitrile based repeating unit and a repeating unit containing silicon side chains. The silicon side chain repeating unit is provided in sufficient amounts so that the terpolymer silicon content is 7 to 20 weight percent. The terpolymer is used primarily in the formulation of multilayer positive operating photoresists.
REFERENCES:
patent: 4481049 (1984-11-01), Reichmanis et al.
patent: 5102771 (1992-04-01), Vogel et al.
patent: 5369200 (1994-11-01), Schaedeli et al.
patent: 5552260 (1996-09-01), Vogel et al.
patent: 5886119 (1999-03-01), Schaedeli et al.
Falcigno Pasquale Alfred
Hofmann Manfred
Mertesdorf Carl-Lorenz
Schaedeli Ulrich
Tinguely Eric
Egwim K. C.
Lipman Bernard
Olin Microelectronic Chemicals, Inc.
LandOfFree
Terpolymers containing organosilicon side chains does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Terpolymers containing organosilicon side chains, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Terpolymers containing organosilicon side chains will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-521293