Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – Mixing of two or more solid polymers; mixing of solid...
Patent
1982-03-22
1983-08-09
Pertilla, Theodore E.
Synthetic resins or natural rubbers -- part of the class 520 ser
Synthetic resins
Mixing of two or more solid polymers; mixing of solid...
20415914, 20415921, 20415922, 430286, C08L 6110, C08G 202
Patent
active
043980015
ABSTRACT:
A resist sensitive to electron beam (and X-ray) radiation but resistant to reactive ion etching is formulated from a novolac resin and a sensitizer which is a terpolymer of sulfur dioxide, an olefin is hydrocarbon and an unsaturated ether.
REFERENCES:
patent: 3684770 (1972-08-01), Hammer
patent: 3893127 (1975-07-01), Kaplan et al.
patent: 3898350 (1975-08-01), Gipstein et al.
Cheng Ying Y.
Grant Barbara D.
Pederson Lester A.
Willson Carlton G.
International Business Machines - Corporation
Pertilla Theodore E.
Walsh Joseph G.
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