Terminal flow sensor

Details Terminal flow sensor Terminal flow sensor

1989-12-15

1991-06-18

Goldstein, Herbert

Measuring and testing

Volume or rate of flow

Thermal type

7320421, G01F 168

Patent

active

050240838

ABSTRACT:
A thermal flow sensor has a heat-sensitive resistor which is disposed at a predetermined angle relative to the line of stream of a fluid, and which has its heat-sensitive portion disposed on the surface portion of a substrate which is positioned downstream in the direction in which the fluid flows. Since the heat-sensitive resistor is already disposed at a predetermined angle relative to the line of stream of the fluid, this permits only slight influence on, hence, variation in detection characteristic to be caused by deviation in the disposition angle. Since the heat-sensitive portion is disposed on a surface portion positioned downstream in the direction of fluid flow, this restrains dust contained in air from directly depositing on the heat-sensitive portion, hence, from causing variation in detection characteristic.

REFERENCES:
patent: 4366709 (1983-01-01), Eiermann et al.
patent: 4587842 (1986-05-01), Handtmann
patent: 4843882 (1989-07-01), Ohta et al.

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