TEOS based spin-on-glass and processes for making and using the

Details TEOS based spin-on-glass and processes for making and using the TEOS based spin-on-glass and processes for making and using the

1991-02-04

1993-02-16

Morris, Theodore

Compositions: coating or plastic

Coating or plastic compositions

Silicon containing other than solely as silicon dioxide or...

501 12, C09D18306

Patent

active

051867451

ABSTRACT:
In on form, a TEOS based spin-on-glass is made having on the order of 10% to 25% by volume of tetraethylorthosilicate, the equivalent of on the order of 0.1% to 3.0% by volume of 70% concentrated nitric acid, on the order of 60% to 90% by volume of alcohol, and the balance water. The spin-on-glass is applied to a semiconductor substrate and heated in order to densify the spin-on-glass.

REFERENCES:
CA107(6): 50440s, Fairchild Semiconductor Corp., 1987.

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