Electricity: electrothermally or thermally actuated switches – Electrothermally actuated switches – With longitudinally expansible solid element
Reexamination Certificate
2005-04-11
2008-03-04
Vortman, Anatoly (Department: 2835)
Electricity: electrothermally or thermally actuated switches
Electrothermally actuated switches
With longitudinally expansible solid element
C337S123000, C310S306000, C310S307000
Reexamination Certificate
active
07339454
ABSTRACT:
A microelectromechanical (MEM) apparatus is disclosed which includes a shuttle suspended above a substrate by two or more sets of tensile-stressed beams which are operatively connected to the shuttle and which can comprise tungsten or a silicon nitride/polysilicon composite structure. Initially, the tensile stress in each set of beams is balanced. However, the tensile stress can be unbalanced by heating one or more of the sets of beams; and this can be used to move the shuttle over a distance of up to several tens of microns. The MEM apparatus can be used to form a MEM relay having relatively high contact and opening forces, and with or without a latching capability.
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Hohimer John P.
Sandia Corporation
Vortman Anatoly
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