Power plants – Motor operated by expansion and/or contraction of a unit of... – Mass is a solid
Reexamination Certificate
2007-01-09
2007-01-09
Nguyen, Hoang (Department: 3748)
Power plants
Motor operated by expansion and/or contraction of a unit of...
Mass is a solid
C310S306000, C359S224200
Reexamination Certificate
active
11146811
ABSTRACT:
A microelectromechanical (MEM) apparatus is disclosed which includes a pair of tensile-stressed actuators suspending a platform above a substrate to tilt the platform relative to the substrate. A tensile stress built into the actuators initially tilts the platform when a sacrificial material used in fabrication of the MEM apparatus is removed. Further tilting of the platform can occur with a change in the ambient temperature about the MEM apparatus, or by applying a voltage to one or both of the tensile-stressed actuators. The MEM apparatus can be used to form a tiltable micromirror or an array of such devices, and also has applications for thermal management within satellites.
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Hohimar John P.
Nguyen Hoang
Sandia Corporation
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