Optics: measuring and testing – Inspection of flaws or impurities – Having predetermined light transmission regions
Patent
1996-07-15
1997-12-23
Font, Frank G.
Optics: measuring and testing
Inspection of flaws or impurities
Having predetermined light transmission regions
356445, 356337, G01N 2100, G01N 2155
Patent
active
057011745
ABSTRACT:
A method for optically inspecting a semiconductor substrate for defects such as oxidation induced stacking faults, and a template mask which assists in practicing the optical inspection method. There is first provided a semiconductor substrate which has a surface to be inspected for defects such as oxidation induced stacking faults. Aligned then upon the surface of the semiconductor substrate to be inspected for defects such as oxidation induced stacking faults is a template mask. The template mask has a minimum of one aperture which leaves exposed a portion of the surface of the semiconductor substrate to be inspected for defects such as oxidation induced stacking faults. Finally, there is inspected optically the portion of the surface of the semiconductor substrate exposed through the aperture.
REFERENCES:
patent: 3658420 (1972-04-01), Axelrod
patent: 4000949 (1977-01-01), Watkins
patent: 4618938 (1986-10-01), Sandland et al.
patent: 5162867 (1992-11-01), Kohno
patent: 5194743 (1993-03-01), Aoyama et al.
patent: 5233203 (1993-08-01), Haga
patent: 5264912 (1993-11-01), Vaught et al.
patent: 5377002 (1994-12-01), Malin et al.
patent: 5428442 (1995-06-01), Lin et al.
patent: 5444529 (1995-08-01), Tateiwa
patent: 5448350 (1995-09-01), Kohno
patent: 5502306 (1996-03-01), Meisburger et al.
patent: 5585918 (1996-12-01), Takeuchi et al.
VLSI Technology, S.M. Sze, McGraw-Hill, 1988, pp. 133-135 no month available.
Chen Shun-Long
Yeh Ching Hua
Ackerman Stephen B.
Font Frank G.
Saile George O.
Stafira Michael P.
Szecsy Alek P.
LandOfFree
Template mask for assisting in optical inspection of oxidation i does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Template mask for assisting in optical inspection of oxidation i, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Template mask for assisting in optical inspection of oxidation i will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1805180