Template having a silicon nitride, silicon carbide or...

Plastic article or earthenware shaping or treating: apparatus – Preform reshaping or resizing means: or vulcanizing means... – Surface deformation means only

Reexamination Certificate

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C249S115000, C264S293000

Reexamination Certificate

active

07874831

ABSTRACT:
An imprint lithography template including, inter alia, a body having a first thickness associated therewith; a patterning layer, having a second thickness associated therewith, comprising a plurality of features, having a third thickness associated therewith.

REFERENCES:
patent: 6387787 (2002-05-01), Mancini et al.
patent: 2003/0179693 (2003-09-01), Ootera
patent: 2004/0169003 (2004-09-01), Lee et al.
patent: 2005/0146079 (2005-07-01), Chou

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