Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2008-05-27
2008-05-27
Lyons, Michael A (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
11349276
ABSTRACT:
In the apparatus according to the present invention, light from a light source is split into measurement light and reference light, the optical path length of the reference light is altered and a plurality of measurement light interference waveforms resulting from the interference of measurement beams reflected at a measurement target and the reference light are measured. One of these interference waveforms is designated as a reference interference waveform, another interference waveform corresponding to a measurement beam reciprocally reflected at the two end surfaces of the measurement target twice more than the measurement beam corresponding to the reference interference waveform is designated as a selected interference waveform, the optical path length of the measurement light indicated by the distance between the two end surfaces of the measurement target is measured based upon these interference waveforms. The temperature of the measurement targets is determined in correspondence to the optical path length.
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“Temperature dependence of the near-infrared refractive index of silicon, gallium arsenide, and indium phosphide” (Phy. Rev. 849, 7408-7417, 1994) by J.A. McCaulley, et al.
Koshimizu Chishio
Suzuki Tomohiro
Lyons Michael A
Oblon & Spivak, McClelland, Maier & Neustadt P.C.
Tokyo Electron Limited
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