Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent
1991-01-31
1992-08-04
Berman, Jack I.
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
2504922, 335213, 335210, H01J 332, H01J 37147, H01J 3730
Patent
active
051361663
ABSTRACT:
A thermally stable magnetic deflection assembly for use in an electron or particle beam machine with several separately potted magnetic coils spaced apart and arranged in a particular vertical position on a central pipe. Non metallic, low coefficient of thermal expansion, highly thermally conductive materials are used throughout and means are provided for maintaining the entire assembly at a desired temperature. Also disclosed is a method of making a thermally stable magnetic deflection assembly.
REFERENCES:
patent: 5012104 (1991-04-01), Young
Berman Jack I.
Etec Systems, Inc.
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