Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1989-11-03
1992-03-17
Kaplsen, Ernest F.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
165 804, 361385, G01R 3102, H05K 720, F28F 700
Patent
active
050972073
ABSTRACT:
ATE is mounted directly to a support surrounding and removably receiving probe cards of differing thickness. An electrically heated chuck having a variable heat transfer coefficient heat exchanging face confronting a liquid nitrogen supplied plenum exhibits a temperature that varies with electrical heater load, rate of liquid nitrogen supply, and heat transfer coefficient of the heat exchanging face. The rate of liquid nitrogen supply is varied as a function of whether or not the electrical heater load falls outside predetermined upper and lower bounds to establish and maintain set point temperature over a range of set point temperatures including liquid nitrogen temperature and ambient temperature. The chuck is mounted for X,Y movement on load-balanced air/vacuum bearing, and is mounted for Z movement to accommodate different thickness probe cards. A load-lock having a pivoting cassette receiving tray that pivots with a pivoting transfer arm is mounted for Z movement with the chuck. A vacuum pump selectively lowers the temperature at which the supplied liquid nitrogen boils. A positive pressure of N.sub.2 gas is maintained to prevent moisture condensation in the load-lock and on the operative surfaces of the chuck.
REFERENCES:
patent: 3361195 (1968-01-01), Meyerhoff et al.
patent: 3437929 (1969-04-01), Glenn
patent: 3524497 (1970-08-01), Chu et al.
patent: 4799543 (1989-01-01), Iverson et al.
Bergles, A. E.; "Two-Piece Cold Plate . . . "; IBM Tech. Dis. Bull.; vol. 22; No. 8A; Jan. 1980; pp. 3318-3319.
Christensen, R. G.; "Water-Cooled . . . "; IBM Tech. Disc. Bull.; vol. 23; No. 4; Sep. 1980; pp. 1445-1446.
"Fluid Cooled . . . "; Research Disclosure; Apr. 1985; No. 252; one page.
John H. Blanz Company, Inc.
Kaplsen Ernest F.
LandOfFree
Temperature stable cryogenic probe station does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Temperature stable cryogenic probe station, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Temperature stable cryogenic probe station will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1478641