Temperature sensor apparatus and method

Thermal measuring and testing – Heat flux measurement

Reexamination Certificate

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Details

C374S135000, C374S163000, C250S338100

Reexamination Certificate

active

07131766

ABSTRACT:
A temperature sensor includes a membrane supported by a substrate and a circuit having elements for a substrate electrical resistance indicative of the temperature of a substrate and a membrane electrical resistance indicative of the temperature of a membrane. The substrate resistance and the membrane resistance are arranged in a bridge configuration to facilitate measurement of a differential voltage responsive to temperature change. The resulting temperature signal includes a first varying portion and a second varying portion. A controller receives a temperature signal from sensor, eliminates the second varying portion and generates a temperature value based on the based on the first varying portion. In this manner, the sensor provides an improved, fast response to changes in the surrounding temperature.

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