Temperature sensor and method of making the same

Details Temperature sensor and method of making the same Temperature sensor and method of making the same

2007-10-09

2007-10-09

Lee, Richard K. (Department: 2832)

Electrical resistors

Resistance value responsive to a condition

Current and/or voltage

C338S025000, C338S256000, C073S053010

Reexamination Certificate

active

10803556

ABSTRACT:
A method for manufacturing a planar sensor, comprises disposing a film of a material on a substrate, wherein the material is selected from the group consisting of platinum, rhodium, palladium and mixtures and alloys comprising at least one of the foregoing materials; annealing the material; measuring a resistance value of the material; laser trimming the annealed material; heat treating the laser trimmed material; and laser trimming the heat treated material to form the sensor.

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