Temperature sensor and method

Details Temperature sensor and method Temperature sensor and method

1997-01-02

1998-08-18

Chilcot, Richard

Thermal measuring and testing

Temperature measurement

By electrical or magnetic heat sensor

327513, G01K 700

Patent

active

057950695

ABSTRACT:
A temperature sensor using doped polysilicon resistors in a bridge configuration, an amplifier, and a doped polysilicon feedback resistor between the input and the output of the amplifier. The polysilicon resistors are doped with selected concentrations of impurities such as boron, phosphorus, arsenic or antimony. The resistors are doped to establish predetermined temperature coefficients so that the resistors exhibit a predetermined temperature dependence. This temperature dependence is utilized to create a temperature sensor that is stable, accurate, and rugged and that has a generally linear output to temperature response.

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