Temperature sensing methods and apparatus

Details Temperature sensing methods and apparatus Temperature sensing methods and apparatus

1996-04-25

1998-05-26

Bennett, G. Bradley

Thermal measuring and testing

Temperature measurement

Nonelectrical, nonmagnetic, or nonmechanical temperature...

374130, 356301, G01K 1100

Patent

active

057555125

ABSTRACT:
This invention relates to apparatus for sensing, remotely, the temperature of a semi-conductor wafer and includes means for shining a single frequency light 11 onto the surface 12 of a semi-conductor wafer 13 so that some of that light is scattered. The scattered light is focused by a lens 15 and the single frequency is filtered out of the scattered light by notch filter 17. The filtered beam is split by beam splitter 18 and the resultant two beams are filtered so that they respectively pass only the Stokes and anti-Stokes frequencies respectively. The intensities of these respective light beams are then measured and from these the temperature of the semi-conductor wafer is calculated.

REFERENCES:
patent: 4081215 (1978-03-01), Penney et al.
patent: 4729668 (1988-03-01), Angel et al.
patent: 4767219 (1988-08-01), Bibby
patent: 5028146 (1991-07-01), Wada
patent: 5054935 (1991-10-01), Tanabe et al.
patent: 5194913 (1993-03-01), Myrick et al.
patent: 5217306 (1993-06-01), Wada
patent: 5235399 (1993-08-01), Usui et al.
patent: 5388909 (1995-02-01), Johnson et al.
patent: 5449233 (1995-09-01), Sai et al.

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