Temperature sensing device for dynamically measuring temperature

Thermal measuring and testing – Temperature measurement – Combined with diverse art device

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324 731, 324511, 374179, G01K 114, G01K 704

Patent

active

052810259

ABSTRACT:
A temperature sensing device for accurately measuring the temperature of a microbonding device tip. The temperature sensing device consists of an array of thin-film thermocouples produced by thin-film patterning techniques on a substrate card. Each thermocouple is composed of two circuit lines of dissimilar metals A & B. The dissimilar metals are superimposed at a junction point. A third metal C is deposited between the metals A and B to prevent premature degradation of the thermocouple junction. A common line is used for one of the two metals connecting to the junctions. This allows almost twice as many thermocouples than conventional layout techniques.

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