Temperature sensing arrangement

Details Temperature sensing arrangement Temperature sensing arrangement

1987-11-27

1990-02-27

Yasich, Daniel M.

Thermal measuring and testing

Temperature measurement

In spaced noncontact relationship to specimen

236 94, 374 11, 374133, 374141, 374129, G01J 532, H01L 2714

Patent

active

049040901

ABSTRACT:
A temperature sensor is incorporated within a housing having a silicon window through which infra-red radiation can enter. Mounted on a support structure is a semiconductor fabrication consisting of a reference junction and a sensing junction, covered with a black absorber. The reference junction is responsive to the temperature of the housing, whereas the sensing junction is responsive to the temperature of the housing and also the temperature of a remote zone from which infra-red radiation can enter the housing via the window. A Peltier heater/cooler controls the temperature of the housing, which temperature is monitored by a sensor to provide a measure of that of the remote zone.

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patent: 4472594 (1984-09-01), Ishida
patent: 4583814 (1986-04-01), Koetser
patent: 4722612 (1988-02-01), Junkert et al.

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