Temperature sensing apparatus

Details Temperature sensing apparatus Temperature sensing apparatus

1987-08-03

1989-08-08

Yasich, Daniel M.

Thermal measuring and testing

Temperature measurement

By electrical or magnetic heat sensor

307310, 374183, G01K 700, G01K 722

Patent

active

048547310

ABSTRACT:
It is desirable to be able to sense the temperature of a semiconductor element to detect, for example, overheating of that element. A temperature sensing apparatus is disclosed which comprises a polysilicon device, functioning as a temperature transducer and integrated with a semiconductor element. A silicon oxide layer separates the temperature transducer device from the element.

REFERENCES:
patent: 3182201 (1965-05-01), Sklar
patent: 3440883 (1969-04-01), Lightner
patent: 3566690 (1971-03-01), Ebrahimi
patent: 3934476 (1976-01-01), Lamb II
patent: 4003038 (1977-01-01), Meijer
patent: 4184126 (1980-01-01), Jaskolski et al.
patent: 4331888 (1982-05-01), Yamauchi
patent: 4549818 (1985-10-01), Nishikubo et al.
patent: 4689659 (1987-08-01), Watanabe

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