Temperature-programmed desorbed gas analyzing apparatus

Measuring and testing – Gas analysis – Detector detail

Reexamination Certificate

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Details

C250S288000

Reexamination Certificate

active

10972327

ABSTRACT:
A temperature-programmed desorbed gas analyzing apparatus including a sample chamber1in which a sample S is disposed, an infrared heating furnace2for heating the sample S disposed in the sample chamber1,a measuring chamber3in which gas desorbed from the sample S by heating is introduced, a turbo molecular pump4for reducing the pressure in the measuring chamber3,a mass spectrometer5having a gas detection portion5adisposed in the measuring chamber3,an intermediate pressure-reduced chamber6provided between the sample chamber1and the measuring chamber3,a first orifice7which the intermediate pressure-reduced chamber6and the sample chamber1intercommunicate with each other, and a second orifice8through which the intermediate pressure-reduced chamber6and the measuring chamber3intercommunicate with each other, and the desorbed gas occurring in the sample chamber1is introduced through the first orifice7,the intermediate pressure-reduced chamber6and the second orifice8into the measuring chamber3.The pressure in the intermediate pressure-reduced chamber6or the measuring chamber3is controlled by pressure adjusting unit so as to be fixed.

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Journal of the Mass Spectrometry Society of Japan, vol. 46, No. 4, pp. 402 and 403, 1998.

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