Electric heating – Heating devices – With power supply and voltage or current regulation or...
Reexamination Certificate
2011-07-12
2011-07-12
Paschall, Mark H (Department: 3742)
Electric heating
Heating devices
With power supply and voltage or current regulation or...
C219S482000, C219S486000, C156S345270, C392S416000
Reexamination Certificate
active
07977609
ABSTRACT:
This invention provides a wafer-type temperature sensor capable of eliminating the need for an A/D converter, adapting itself to automation and improving the heat resistance to measure temperature distribution of the upper surface of a wafer, a temperature measuring device using the sensor, a thermal processor having a temperature measurement function and a temperature measurement method. The wafer-type temperature sensor comprises a wafer and a plurality of temperature sensors arranged in regions which are formed by segmenting the upper surface of the wafer into a plurality of regions. Each of the temperature sensors includes an oscillation circuit for oscillating a frequency signal corresponding to the temperature of its own region within a frequency band that is different for every region in response to input of power supply voltage.
REFERENCES:
patent: 3586830 (1971-06-01), Leitner et al.
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patent: 7523889 (2009-04-01), Bourjac et al.
patent: 2002-124457 (2002-04-01), None
patent: 2004-150860 (2004-05-01), None
Fukuoka Tetsuo
Kitano Takahiro
Matsumoto Toshiyuki
Minami Tomohide
Sata Nobuyuki
Finnegan Henderson Farabow Garrett & Dunner LLP
Paschall Mark H
Tokyo Electron Limited
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