Temperature measuring apparatus using change of magnetic field

Details Temperature measuring apparatus using change of magnetic field Temperature measuring apparatus using change of magnetic field

2007-10-02

2007-10-02

Verbitsky, Gail (Department: 2859)

Thermal measuring and testing

Temperature measurement

By electrical or magnetic heat sensor

C374S141000, C374S120000, C118S725000, C324S263000

Reexamination Certificate

active

11167093

ABSTRACT:
A temperature measuring apparatus measures the temperature of a wafer in real time using a change of magnetic field during a thermal process. The temperature measuring apparatus includes: at least one conductive structure disposed on one surface of the wafer, in which an electrical conductivity of the conductive structure varies depending on temperature; a magnetic field generator installed facing the conductive structure with respect to a center of the wafer; and a magnetic field measuring sensor installed above the conductive structure.

REFERENCES:
patent: 5354130 (1994-10-01), Seppa et al.
patent: 5462603 (1995-10-01), Murakami
patent: 5466614 (1995-11-01), Yakura et al.
patent: 6064220 (2000-05-01), Sugasawara et al.
patent: 6150809 (2000-11-01), Tiernan et al.
patent: 6160242 (2000-12-01), Guardado
patent: 6462538 (2002-10-01), Harada
patent: 6503364 (2003-01-01), Masuda et al.
patent: 6671232 (2003-12-01), Stupp
patent: 6794886 (2004-09-01), Chen et al.
patent: 6864108 (2005-03-01), Papa Rao et al.
patent: 7053607 (2006-05-01), Sato
patent: 2002/0153882 (2002-10-01), Grimes et al.
patent: 2003/0186519 (2003-10-01), Downey et al.
patent: 2004/0154747 (2004-08-01), Ni et al.
patent: 2005/0185346 (2005-08-01), Shoji
patent: 2006/0291106 (2006-12-01), Shoji

Affiliated with

Also associated with

Rating

Temperature measuring apparatus using change of magnetic field does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Temperature measuring apparatus using change of magnetic field, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Temperature measuring apparatus using change of magnetic field will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3827908