Optics: measuring and testing – By light interference – Using fiber or waveguide interferometer
Reexamination Certificate
2008-04-08
2008-04-08
Chowdhury, Tarifur (Department: 2886)
Optics: measuring and testing
By light interference
Using fiber or waveguide interferometer
C385S012000
Reexamination Certificate
active
07355715
ABSTRACT:
Light from a light source is split at a first splitter into a temperature measurement beam and a reference beam, the temperature measurement beam is further split at a second splitter into first through nth measurement beams, and the reference beam is reflected at a reference beam reflecting means. The first through nth measurement beams are radiated onto a temperature measurement target by ensuring that the optical path lengths of the first through nth measurement beams extending from the second splitter to the temperature measurement target are different from one another. By driving the reference beam reflecting means, the optical path length of the reference beam reflected at the reference beam reflecting means is altered, and concurrently, a light receiving means senses and measures interference induced by the first through and measurement beams reflected at the temperature measurement target and the reference beam reflected at the reference beam reflecting means.
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Koshimizu Chishio
Suzuki Tomohiro
Chowdhury Tarifur
Hansen Jonathan M
Oblon & Spivak, McClelland, Maier & Neustadt P.C.
Tokyo Electron Limited
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