Electric resistance heating devices – Heating devices – Radiant heater
Reexamination Certificate
2005-12-14
2009-11-10
Fuqua, Shawntina (Department: 3742)
Electric resistance heating devices
Heating devices
Radiant heater
C392S418000, C219S390000, C219S405000, C219S411000, C118S724000, C118S725000, C118S050100, C266S087000, C374S121000, C374S161000, C374S141000, C148S565000
Reexamination Certificate
active
07616872
ABSTRACT:
Temperature measurement and heat-treating methods and systems. One method includes identifying a temperature of a first surface of a workpiece, and controlling energy of an irradiance flash incident on the first surface of the workpiece, in response to the temperature of the first surface. Identifying may include identifying the temperature of the first surface during an initial portion of the irradiance flash, and controlling may include controlling the power of a remaining portion of the irradiance flash. The first surface of the workpiece may include a device side of a semiconductor wafer.
REFERENCES:
patent: 1587023 (1926-06-01), Mottlau
patent: RE24296 (1957-03-01), Stewart
patent: 2981819 (1961-04-01), Gregory
patent: 3047438 (1962-07-01), Marinace
patent: 3108173 (1963-10-01), Barrett et al.
patent: 3160517 (1964-12-01), Jenkin
patent: 3213827 (1965-10-01), Jenkin
patent: 3227065 (1966-01-01), Litman
patent: 3239651 (1966-03-01), Silberman
patent: 3240915 (1966-03-01), Carter et al.
patent: 3460510 (1969-08-01), Currin
patent: 3502516 (1970-03-01), Henker
patent: 3623712 (1971-11-01), McNeilly et al.
patent: 3627590 (1971-12-01), Manunel
patent: 3661637 (1972-05-01), Sirtl
patent: 3692572 (1972-09-01), Strehlow
patent: 3700850 (1972-10-01), Lumley et al.
patent: 3836751 (1974-09-01), Anderson
patent: 3913872 (1975-10-01), Weber
patent: 4027185 (1977-05-01), Nodwell et al.
patent: 4041278 (1977-08-01), Boah
patent: 4081313 (1978-03-01), McNeilly et al.
patent: 4097226 (1978-06-01), Erikson et al.
patent: 4101759 (1978-07-01), Anthony et al.
patent: 4115163 (1978-09-01), Gorina et al.
patent: 4122240 (1978-10-01), Banas et al.
patent: 4151008 (1979-04-01), Kirkpatrick
patent: 4164643 (1979-08-01), Peart et al.
patent: 4220483 (1980-09-01), Cazcarra
patent: 4224096 (1980-09-01), Osborne
patent: 4233493 (1980-11-01), Nath
patent: 4306731 (1981-12-01), Shaw
patent: 4308078 (1981-12-01), Cook
patent: 4315130 (1982-02-01), Inagaki et al.
patent: 4331485 (1982-05-01), Gat
patent: 4356384 (1982-10-01), Gat
patent: 4370175 (1983-01-01), Levatter
patent: 4375993 (1983-03-01), Mori et al.
patent: 4379727 (1983-04-01), Hansen et al.
patent: 4398094 (1983-08-01), Hiramoto
patent: 4421048 (1983-12-01), Adema et al.
patent: 4431459 (1984-02-01), Teng
patent: 4455479 (1984-06-01), Itoh et al.
patent: 4482393 (1984-11-01), Nishiyama et al.
patent: 4493977 (1985-01-01), Arai et al.
patent: 4504323 (1985-03-01), Arai et al.
patent: 4533820 (1985-08-01), Shimizu
patent: 4539431 (1985-09-01), Moddel et al.
patent: 4540876 (1985-09-01), McGinty
patent: 4550245 (1985-10-01), Arai et al.
patent: 4550684 (1985-11-01), Mahawili
patent: 4567352 (1986-01-01), Mimura et al.
patent: 4581520 (1986-04-01), Vu et al.
patent: 4636969 (1987-01-01), Kyoden et al.
patent: 4649241 (1987-03-01), Young et al.
patent: 4649261 (1987-03-01), Sheets
patent: 4661177 (1987-04-01), Powell
patent: 4682594 (1987-07-01), Mok
patent: 4698486 (1987-10-01), Sheets
patent: 4700102 (1987-10-01), Camm et al.
patent: 4751193 (1988-06-01), Myrick
patent: 4755654 (1988-07-01), Crowley et al.
patent: 4787551 (1988-11-01), Hoyt et al.
patent: 4794619 (1988-12-01), Tregay
patent: 4818327 (1989-04-01), Davis et al.
patent: 4826269 (1989-05-01), Streifer et al.
patent: 4851358 (1989-07-01), Huber
patent: 4857689 (1989-08-01), Lee
patent: 4857704 (1989-08-01), Jannot et al.
patent: 4890245 (1989-12-01), Yomoto et al.
patent: 4891499 (1990-01-01), Moslehi
patent: 4933887 (1990-06-01), Danko et al.
patent: 4937490 (1990-06-01), Camm et al.
patent: 4956538 (1990-09-01), Moslehi
patent: 4958061 (1990-09-01), Wakabayashi et al.
patent: 4959244 (1990-09-01), Penney et al.
patent: 4979134 (1990-12-01), Arima et al.
patent: 4981815 (1991-01-01), Kakoschke
patent: 4984902 (1991-01-01), Crowley et al.
patent: 5002630 (1991-03-01), Kermani et al.
patent: 5011794 (1991-04-01), Grim et al.
patent: 5041714 (1991-08-01), Funk
patent: 5073698 (1991-12-01), Stultz
patent: 5155336 (1992-10-01), Gronet et al.
patent: 5155337 (1992-10-01), Sorrell et al.
patent: 5188458 (1993-02-01), Thompson et al.
patent: 5196353 (1993-03-01), Sandhu et al.
patent: 5213985 (1993-05-01), Sandroff et al.
patent: 5219786 (1993-06-01), Noguchi
patent: 5231595 (1993-07-01), Makino et al.
patent: 5249142 (1993-09-01), Shirakawa et al.
patent: 5255286 (1993-10-01), Moslehi et al.
patent: 5258824 (1993-11-01), Carlson et al.
patent: 5271084 (1993-12-01), Vandenabeele et al.
patent: 5275629 (1994-01-01), Ajika et al.
patent: 5279973 (1994-01-01), Suizu
patent: 5282017 (1994-01-01), Kasindorf et al.
patent: 5293216 (1994-03-01), Moslehi
patent: 5305417 (1994-04-01), Najm et al.
patent: 5308161 (1994-05-01), Stein
patent: 5310260 (1994-05-01), Schietinger et al.
patent: 5313044 (1994-05-01), Massoud et al.
patent: 5317429 (1994-05-01), Mochizuki et al.
patent: 5317656 (1994-05-01), Moslehi et al.
patent: 5325180 (1994-06-01), Chappelow et al.
patent: 5326173 (1994-07-01), Evans et al.
patent: 5336641 (1994-08-01), Fair et al.
patent: 5347128 (1994-09-01), Puram et al.
patent: 5350899 (1994-09-01), Ishikawa et al.
patent: 5359693 (1994-10-01), Nenyei et al.
patent: 5364186 (1994-11-01), Wang et al.
patent: 5373135 (1994-12-01), Beyer et al.
patent: 5387557 (1995-02-01), Takagi
patent: 5399506 (1995-03-01), Tsukamoto
patent: 5399523 (1995-03-01), Kakoschke
patent: 5407485 (1995-04-01), Takagi
patent: 5418885 (1995-05-01), Hauser et al.
patent: 5431700 (1995-07-01), Sloan
patent: 5436172 (1995-07-01), Moslehi
patent: 5436443 (1995-07-01), Abtahi
patent: 5442727 (1995-08-01), Fiory
patent: 5444217 (1995-08-01), Moore et al.
patent: 5445676 (1995-08-01), Takagi
patent: 5446824 (1995-08-01), Moslehi
patent: 5446825 (1995-08-01), Moslehi et al.
patent: 5460451 (1995-10-01), Wadman
patent: 5463534 (1995-10-01), Raven
patent: 5487127 (1996-01-01), Gronet et al.
patent: 5490728 (1996-02-01), Schietinger et al.
patent: 5501637 (1996-03-01), Duncan et al.
patent: 5508934 (1996-04-01), Moslehi et al.
patent: 5514885 (1996-05-01), Myrick
patent: 5517359 (1996-05-01), Gelbart
patent: 5530221 (1996-06-01), Benda et al.
patent: 5539855 (1996-07-01), Takahashi et al.
patent: 5553939 (1996-09-01), Dilhac et al.
patent: 5561612 (1996-10-01), Thakur
patent: 5561735 (1996-10-01), Camm
patent: 5568978 (1996-10-01), Johnson et al.
patent: 5580388 (1996-12-01), Moore
patent: 5593608 (1997-01-01), Suzuki
patent: 5597237 (1997-01-01), Stein
patent: 5601366 (1997-02-01), Paranjpe
patent: 5603772 (1997-02-01), Ide
patent: 5604592 (1997-02-01), Kotidis et al.
patent: 5628564 (1997-05-01), Nenyei et al.
patent: 5635093 (1997-06-01), Arena et al.
patent: 5635409 (1997-06-01), Moslehi
patent: 5650082 (1997-07-01), Anderson
patent: 5654904 (1997-08-01), Thakur
patent: 5667300 (1997-09-01), Mandelis et al.
patent: 5677240 (1997-10-01), Murakami et al.
patent: 5683180 (1997-11-01), De Lyon et al.
patent: 5710407 (1998-01-01), Moore et al.
patent: 5715361 (1998-02-01), Moslehi
patent: 5727017 (1998-03-01), Maurer et al.
patent: 5738440 (1998-04-01), O'Neill et al.
patent: 5790750 (1998-08-01), Anderson
patent: 5802099 (1998-09-01), Curran et al.
patent: 5809211 (1998-09-01), Anderson et al.
patent: 5814365 (1998-09-01), Mahawili
patent: 5815396 (1998-09-01), Shimamura et al.
patent: 5822172 (1998-10-01), White
patent: 5830277 (1998-11-01), Johnsgard et al.
patent: 5841110 (1998-11-01), Nenyei et al.
patent: RE36050 (1999-01-01), Thakur et al.
patent: 5858819 (1999-01-01), Miyasaka
patent: 5893952 (1999-04-01), Aronowitz et al.
patent: 5900649 (1999-05-01), Effelsberg
patent: 5908307 (1999-06-01), Talwar et al.
patent: 5937142 (1999-08-01), Messner et al.
patent: 5944422 (1999-08-01), Doitel et al.
patent: 5960158 (1999-09-01), Gat et al.
patent: 5971565 (1999-10-01), Zapata et al.
patent: 5993059 (1999-11-01), O'Neill et al.
patent: 5998768 (1999-12-01), Hunter et al.
patent: 6016383 (2000-01-01), Gronet et al.
patent: 6051483 (2000-04-01), Lee et al.
patent: 6056434 (2000-05-01), Champetier
patent: 6066516 (2000-05-01), Miyasaka
patent: 6108490 (2000-08-01), Lee et al.
patent: 6122439 (2000-09-01), Gronet et al.
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Camm David M.
Kervin Shawna
Lefrancois Marcel Edmond
Stuart Greg
Fuqua Shawntina
Knobbe Martens Olson & Bear LLP
Mattson Technology Canada, Inc.
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