Temperature controller for semiconductor device

Details Temperature controller for semiconductor device Temperature controller for semiconductor device

1986-02-10

1987-08-25

James, Andrew J.

Coherent light generators

Particular component circuitry

Optical pumping

357 28, 357 87, 372 34, 372 36, 361388, H01L 2306, H01L 2338, H01S 3045, H05K 720

Patent

active

046896597

ABSTRACT:
A temperature controller includes a temperature sensor mounted on a semiconductor device to be controlled in temperature, a temperature controlling assembly mounted on the semiconductor device and responsive to an output signal from the temperature sensor for controlling the temperature of the semiconductor device so as to be substantially constant, and a thermal insulation disposed around the semiconductor device and the temperature sensor in contact therewith. Since the temperature of the semiconductor device is directly detected by the temperature sensor, and directly controlled by the temperature controlling assembly, the temperature of the semiconductor device can be controlled quickly. The temperature of the semiconductor device can also be controlled highly accurately since the temperature sensor and the temperature controlling assembly are mounted directly on the semiconductor device and surrounded by the thermal insulation.

REFERENCES:
patent: 4403243 (1983-09-01), Hakamada
patent: 4571728 (1986-02-01), Yoshikawa
patent: 4604753 (1986-08-01), Sawai

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