Temperature controlled vacuum chuck

Details Temperature controlled vacuum chuck Temperature controlled vacuum chuck

2007-01-09

2007-01-09

Wilson, Gregory (Department: 3749)

Heating

Accessory means for holding, shielding or supporting work...

Support structure for heat treating ceramics

C279S003000

Reexamination Certificate

active

10479078

ABSTRACT:
A temperature controllable vacuum chuck includes a mounting bracket, a porous plate, a heating element, and a temperature sensor. The porous plate is mounted to the mounting bracket and is configured for securing a substrate to the vacuum chuck when air is suctioned out of the vacuum chuck. The heating element is attached to the bottom of the porous plate and uniformly heats the porous plate, thereby heating any substrate mounted on the vacuum chuck and enabling control over the cure rate of fluid materials deposited on the substrate. The temperature sensor measures the temperature of the porous plate so that it can be adjusted when desired with a user controllable temperature control component.

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International Search Report—PCT/US02/17522; ISA/US; mailed: Feb. 26, 2003.

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