Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate
2006-09-25
2010-11-23
Pelham, Joseph M (Department: 3742)
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
C219S444100, C118S725000, C118S728000
Reexamination Certificate
active
07838800
ABSTRACT:
A substrate holder for supporting a substrate in a processing system includes a temperature controlled support base having a first temperature, a substrate support opposing the temperature controlled support base and configured to support the substrate, and one or more heating elements coupled to the substrate support and configured to heat the substrate support to a second temperature above the first temperature. An erosion resistant thermal insulator disposed between the temperature controlled support base and the substrate support, wherein the erosion resistant thermal insulator includes a material composition configured to resist halogen-containing gas corrosion.
REFERENCES:
patent: 5667622 (1997-09-01), Hasegawa et al.
patent: 6239402 (2001-05-01), Araki et al.
patent: 6406545 (2002-06-01), Shoda et al.
patent: 6414276 (2002-07-01), Babikian
patent: 6472643 (2002-10-01), Babikian
patent: 6566632 (2003-05-01), Katata et al.
patent: 6847014 (2005-01-01), Benjamin et al.
patent: 6921724 (2005-07-01), Kamp et al.
patent: 7025858 (2006-04-01), Chou
patent: 7252738 (2007-08-01), Tong et al.
patent: 7311797 (2007-12-01), O'Donnell et al.
patent: 7544251 (2009-06-01), Holland et al.
patent: 2003/0089457 (2003-05-01), Nallan et al.
patent: 2005/0029244 (2005-02-01), Ito et al.
patent: 2005/0173404 (2005-08-01), Benjamin et al.
patent: 2006/0076109 (2006-04-01), Holland et al.
patent: 2006/0102613 (2006-05-01), Kuibira et al.
patent: 2007/0056953 (2007-03-01), Awazu et al.
patent: 2007/0079761 (2007-04-01), Yendler et al.
patent: 1529994 (2004-09-01), None
patent: 10-083960 (1998-03-01), None
patent: 2000-269189 (2000-09-01), None
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Pelham Joseph M
Tokyo Electron Limited
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