Electrical resistors – Resistance value responsive to a condition – Gas – vapor – or moisture absorbing or collecting
Patent
1992-10-26
1994-09-06
Lateef, Marvin M.
Electrical resistors
Resistance value responsive to a condition
Gas, vapor, or moisture absorbing or collecting
338307, 257253, 437918, H01C 700, H01C 1012
Patent
active
053452135
ABSTRACT:
Planar forms of chemically-sensitive materials have been combined, under temperature control, with the pixels of a specially-designed micro-hotplate array to produce a miniature device capable of analyzing chemical mixtures. The device uses integrated multiple elements having different adsorption properties and temperatures to collectively achieve chemical selectivity in sensing. The method of making and using selectively in sensing. The device of the present invention is manufactured by standard CMOS foundry techniques which allow the production of a range of devices that have improved sensing performance.
REFERENCES:
patent: 3509431 (1970-04-01), Iles et al.
patent: 3571917 (1971-03-01), Merryman et al.
patent: 4103073 (1978-07-01), McAlear et al.
patent: 4142925 (1979-03-01), King et al.
patent: 4181544 (1980-01-01), Cho
patent: 4286377 (1981-09-01), Hurko et al.
patent: 4292730 (1981-10-01), Ports
patent: 4425379 (1984-01-01), Vora et al.
patent: 4470875 (1984-09-01), Poteat
patent: 4542640 (1985-09-01), Clifford
patent: 4574264 (1986-03-01), Takahashi et al.
patent: 4612083 (1986-09-01), Yasumoto et al.
patent: 4636767 (1987-01-01), Barger et al.
patent: 4701739 (1987-10-01), Sasaki
patent: 4728591 (1988-03-01), Clark et al.
patent: 4743954 (1988-05-01), Brown
patent: 4816800 (1989-03-01), Onaga et al.
patent: 4824803 (1989-04-01), Us et al.
patent: 4892834 (1990-01-01), Rauh
patent: 4897361 (1990-01-01), Harriott et al.
patent: 4897814 (1990-01-01), Clark
patent: 4918032 (1990-04-01), Jain et al.
patent: 4985373 (1991-01-01), Levinstein et al.
patent: 5019885 (1991-05-01), Yagawara et al.
patent: 5050091 (1991-09-01), Rubin
patent: 5071770 (1991-12-01), Kolesar, Jr.
patent: 5075250 (1991-12-01), Hawkins et al.
patent: 5131954 (1992-07-01), Vogeli et al.
patent: 5140393 (1992-08-01), Hijikihigawa et al.
patent: 5143696 (1992-09-01), Haas et al.
patent: 5185130 (1993-02-01), Camanzi et al.
N. Yamazeo and T. Seiyama, Proc. of the 3rd Int'l. Conf. on Solid State Sors and Actuators (IEEE, Philadelphia, 1985), p. 376.
P. T. Mosely and B. C. Tolfield, Solid State Gas Sensors (Adam Hilger, Bristol, 1987).
S. R. Morrison, Proc. of the 2nd Int'l. Meeting on Chemical Sensors (Bordeaux, 1986), p. 39.
J. F. McAleer, P. T. Moseley, J. O. W. Morris and D. E. Williams, J. Chem. Soc. Faraday Trans. I 83, 1323 (1987).
A. Ikegami and M. Kaneyasu, 1985 Digest of Technical Papers, Int. Conf. Solid State Sensors and Actuators, "Transducers 85", IEEE (Library of Congress 84-62799) p. 74.
Chang et al., (S. C. Chang and D. B. Hicks, 1985 Digest of Technical) Papers, Ind. Conf. Solid State Sensors and Actuators, "Transducers 85", IEEE (Library of Congress 84-62799) p. 381.
Wang, et al., (X. Wang, S. Yee, and P. Carey), Proc. of the 1992 IEEE Workshop on Sensors (Hilton Head, 1992), p. 23.
Najafi et al. (N. Najafi, K. D. Wise, R. Merchange and J. W. Schwank), Proc. of the 1992 IEEE Workshop on Sensors (Hilton Head, 1992), p. 19.
M. Parameswaran et al., "Micromachined Thermal Radiation Emitter from a -Commercial CMOS Process", IEEE Electron Device Letters, vol. 12, No. 2 (1991) pp. 57-60.
Jaeggi et al., "Thermoelectric AC Power Sensor by CMOS Technology", IEEE Electron Device Letters, vol. 13, No. 7 (1992), p. 366.
Cavicchi Richard E.
Gaitan Michael
Semancik Stephen
Suehle John S.
Gzybowski Michael S.
Lateef Marvin M.
The United States of America as represented by the Secretary of
LandOfFree
Temperature-controlled, micromachined arrays for chemical sensor does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Temperature-controlled, micromachined arrays for chemical sensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Temperature-controlled, micromachined arrays for chemical sensor will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1332144