Refrigeration – Automatic control – Of external fluid or means
Reexamination Certificate
2011-01-18
2011-01-18
Tyler, Cheryl J (Department: 3744)
Refrigeration
Automatic control
Of external fluid or means
C062S185000, C062S259200, C062S434000, C361S699000
Reexamination Certificate
active
07870751
ABSTRACT:
A temperature control system and a substrate processing apparatus are provided. The temperature control system for controlling temperatures of one or more members of a substrate processing apparatus includes a circulation system for circulating a first coolant to pass through the inside of each of the members, a heat exchanger for performing heat exchange between the first coolant of the circulation system and a second coolant, and a chiller for supplying the second coolant to the heat exchanger, wherein the circulation system includes a branch line for each of the members passing through the inside thereof, the branch line for each of the members is provided with a heating member for heating the first coolant supplied thereto, and the heat exchanger is installed in a room where the substrate processing apparatus is installed.
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Office Action issued Jul. 27, 2010 , in Japan Patent Office No. 2005-068975, filed Jul. 15, 2010 (with English-language translation).
Hayami Toshihiro
Kaneko Kengo
Koagel Jonathan
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Tokyo Electron Limited
Tyler Cheryl J
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