Temperature control of parylene dimer

Details Temperature control of parylene dimer Temperature control of parylene dimer

1998-03-16

2000-02-08

Bennett, Henry

Drying and gas or vapor contact with solids

Apparatus

With fluid current conveying of treated material

F26B 1700

Patent

active

060215828

ABSTRACT:
An apparatus for vaporizing Parylene AF dimer powder includes a vaporizer having a housing, a cooling coil surrounding the housing and an isolation valve coupled to an outlet end of the housing. During use, the vaporizer and a valve and manifold assembly coupled to the vaporizer are heated by an oven. The Parylene AF dimer powder inside of the vaporizer is initially maintained below its sublimation temperature by flowing a cooling fluid through the cooling coil while the oven heats up. After the oven and valve and manifold assembly reach the operating temperature, the cooling fluid flow is decreased and correspondingly the vaporizer temperature increased thus producing Parylene AF4 dimer vapor.

REFERENCES:
patent: 5538758 (1996-07-01), Beach et al.
Harrus, et al., "Two Approaches to the Development of Low k Systems; Parylene AF-4, and Flourinated Amorphous Carbon", Electrochemical Society of Japan; The 52nd Symposium on Semiconductors and Integrated Circuits Technology (SSICT), Jun. 1997, 6 pages.
Ralston, et al., "Integration of Thermally Stable, Low-k AF4 Polymer for 0.18 .mu.m Interconnects and Beyond", 1997 Symposium on VLSI Technology, Jun. 10-12, Kyoto, Japan, 2 pages.

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