Refrigeration – Low pressure cold trap process and apparatus
Patent
1985-07-03
1987-07-14
Capossela, Ronald C.
Refrigeration
Low pressure cold trap process and apparatus
55269, 62100, 62268, 417901, B01D 800
Patent
active
046794018
ABSTRACT:
To control the temperature of one or more heat sinks of a cryogenic refrigerator in a cryopump, refrigerant gas to the refrigerator is diverted through heat exchangers associated with the refrigerator heat sinks. The diverted refrigerant gas may be used to maintain the temperature of the first stage cryopumping surfaces above some level to avoid cross over hangup. The second stage cryopumping surfaces may be warmed by the diverted refrigerant to some temperature level for partial regeneration. Both heat sinks may be warmed for full regeneration of the cryopump. Bleed flow of refrigerant gas cooled by the first stage of the refrigerator can be directed past a thermal mass to cool that mass. By reversing the flow of refrigerant gas during cooldown of the system, the thermal mass can be used to more rapidly cool the refrigerator. The thermal mass is thermally isolated from the refrigerator heat sinks and is positioned within the vacuum vessel of the cryopump adjacent to the first stage of the refrigerator.
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R. A. Byrns and G. A. Newell, "Cryopump Operations with the Tokamak Neutral Beam Injector Prototype", pp. 1145-1152.
John F. Peterson and Hans A. Steinherz, "Vacuum Pump Technology; A Short Course on Theory and Operations", Solid State Technology, pp. 104-110, Jan. 1982.
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Bartlett Allen J.
Lessard Philip A.
Peterson John F.
Capossela Ronald C.
Helix Technology Corporation
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