Heat exchange – Intermediate fluent heat exchange material receiving and... – Liquid fluent heat exchange material
Reexamination Certificate
2011-07-12
2011-07-12
Tyler, Cheryl J (Department: 3744)
Heat exchange
Intermediate fluent heat exchange material receiving and...
Liquid fluent heat exchange material
C236S09100C, C062S331000, C062S259200
Reexamination Certificate
active
07975759
ABSTRACT:
A temperature control apparatus that controls a temperature of a target object by a heat exchange between a temperature control liquid and the target object. The apparatus includes a pressurizing unit that pressurizes the temperature control liquid to increase a boiling point thereof; a heating unit that increases a temperature of the temperature control liquid to become higher than or equal to a boiling point of the temperature control liquid observed at a normal pressure; and a heat exchanging unit that exchanges heat between the target object and the temperature control liquid whose temperature has been increased to become higher than or equal to the boiling point of the temperature control liquid observed at the normal pressure.
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“Molecular Aspects of Thermal Conductivity: Heat Transfer Basics.” Snurr Research Group. Nov. 24, 2004. Web. Nov. 4, 2010. <http://zeolites.cqe.northwestern.edu/Module/heattrans.html>.
Ariyama Toshikazu
Hatta Masataka
Hosaka Kazuki
Kono Yoshinao
Bradford Jonathan
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Tokyo Electron Limited
Tyler Cheryl J
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