Temperature control method and apparatus for use in thermal proc

Details Temperature control method and apparatus for use in thermal proc Temperature control method and apparatus for use in thermal proc

1994-09-09

1997-01-14

Paschall, Mark H.

Electric heating

Heating devices

With power supply and voltage or current regulation or...

219494, 219497, 219486, 373102, 432120, H05B 102

Patent

active

055936083

ABSTRACT:
A method for controlling temperature in thermal processing equipment having a processing chamber containing members to be processed. The method comprises the steps of heating a plurality of zones of the processing chamber by heaters provided in the zones, respectively, measuring periods of time which elapse until temperatures in the zones increase from a predetermined value to at least one reference value, obtaining time differences among the periods measured, and storing the time differences into a memory, and adjusting timings of heating the zones by the heater, thereby to reduce the time differences.

REFERENCES:
patent: 4467182 (1984-08-01), Merkel
patent: 4952227 (1990-08-01), Herrington et al.
patent: 5026971 (1991-06-01), Payne et al.
patent: 5120936 (1992-06-01), Shyu et al.
patent: 5125068 (1992-06-01), McNair et al.

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