Temperature control method and apparatus

Details Temperature control method and apparatus Temperature control method and apparatus

2008-01-29

2008-01-29

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Specific application of temperature responsive control system

C700S299000, C702S099000, C702S130000

Reexamination Certificate

active

07324877

ABSTRACT:
In a method of controlling the temperature of a target object by measuring to obtain detected temperatures at a plurality of measurement positions and controlling a processing device such as a heater such that each detected temperature will match the corresponding one of target temperatures set for the processing device, a preliminary step is taken to determine the degrees of interference at the measurement positions by varying the target temperatures and the degrees of interference thus determined are used to correct the set target temperatures or the detected temperatures.

REFERENCES:
patent: 4688180 (1987-08-01), Motomiya
patent: 6349270 (2002-02-01), Gurary et al.
patent: 6496749 (2002-12-01), Yamaguchi et al.
patent: 6803548 (2004-10-01), Wang et al.
patent: 6810298 (2004-10-01), Emoto
patent: 2002/0055080 (2002-05-01), Kazuo
patent: 2003/0121905 (2003-07-01), Nanno et al.
patent: 1291741 (2003-12-01), None
EP Patent application No. 05021191.1-2206 Written Opinion dated Feb. 2, 2006.

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