Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate
2011-01-11
2011-01-11
Paik, Sang Y (Department: 3742)
Electric heating
Heating devices
Combined with container, enclosure, or support for material...
C219S444100
Reexamination Certificate
active
07868270
ABSTRACT:
A temperature control method is used for controlling a temperature of a hot plate, so that a measured temperature of the hot plate conforms to a target temperature thereof, in a heat processing apparatus for performing a heat process on a substrate placed on the hot plate, which is used in a coating/developing system for applying a resist coating onto the substrate to form a resist film and then performing development on the resist film after light exposure. The method includes acquiring adjustment data necessary for adjusting a reaching time defined by a time period for increasing the temperature of the substrate from a first temperature around an initial temperature to a second temperature around the target temperature; and adjusting the target temperature by use of the adjustment data thus acquired, after starting the process on the substrate.
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Nakayama Hisakazu
Ookura Jun
Sekimoto Eiichi
Oblon, Spivak McClelland, Maier & Neustadt, L.L.P.
Paik Sang Y
Tokyo Electron Limited
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