Temperature control device for target substrate, temperature...

Details Temperature control device for target substrate, temperature... Temperature control device for target substrate, temperature...

2011-08-02

2011-08-02

Norman, Marc E (Department: 3744)

Automatic temperature and humidity regulation

Miscellaneous

Burner controls with automatic cutoff

C062S179000, C062S259200, C361S699000, C165S104330, C156S345530

Reexamination Certificate

active

07988062

ABSTRACT:
A temperature control device for a target substrate includes a mounting table having temperature control members respectively provided in temperature systems to control temperatures of regions of the target substrate to respective predetermined temperature levels; circulation channels through which fluids passing through the temperature control members flow; and heating channels each for flowing therein a heated fluid having a higher temperature compared to the fluids circulating in the circulation channels. The device further includes cooling channels each for flowing therein a cooled fluid having a lower temperature compared to the fluids circulating in the circulation channels; and joining units that join the circulation channels to build the respective temperature control systems, the joining units having flow rate control units that controls flow rate ratios of the fluids supplied from the respective channels to the temperature control members.

REFERENCES:
patent: 5974816 (1999-11-01), Endo
patent: 6634177 (2003-10-01), Lin et al.
patent: 6986261 (2006-01-01), Sasaki et al.
patent: 7000416 (2006-02-01), Hirooka et al.
patent: 2008/0271471 (2008-11-01), Nozawa et al.
patent: 7-271452 (1995-10-01), None
patent: 2001-134324 (2001-05-01), None

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