Temperature control device and temperature control method

Heat exchange – With timer – programmer – time delay – or condition responsive... – Having heating and cooling capability

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Details

165297, 165300, 62434, F25B 2900

Patent

active

061489093

ABSTRACT:
A temperature control system which performs control of an object whose temperature is to be controlled as accurately as possible. The system comprises: a chiller located in a fluid circulating and supplying system, for cooling a thermal fluid returning from a vacuum chamber, a first flow control valve located in the fluid circulating and supplying system in a position between the chiller and the vacuum chamber, a bypass passage for splitting and supplying thermal fluid returning from the vacuum chamber to a position between the first flow control valve and the vacuum chamber, before it reaches the chiller, a second flow control valve located in the bypass passage, and a halogen lamp heater located in the fluid circulating and supplying system in a position between a confluence point of the bypass passage and the vacuum chamber, for adjusting the temperature of the thermal fluid passing therethrough to a set temperature.

REFERENCES:
patent: 3882930 (1975-05-01), Schexnayder
patent: 4415847 (1983-11-01), Galloway
patent: 4984628 (1991-01-01), Uchida et al.
patent: 5137079 (1992-08-01), Anderson
patent: 5706883 (1998-01-01), Ward

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