Heat exchange – With timer – programmer – time delay – or condition responsive... – Having heating and cooling capability
Patent
1994-01-21
1998-01-13
Ford, John K.
Heat exchange
With timer, programmer, time delay, or condition responsive...
Having heating and cooling capability
165264, 165 61, 165 64, 165290, 165 804, F25B 2900
Patent
active
057068909
ABSTRACT:
A temperature control and process for adjusting the temperature of a workstation and a work medium at a workstation to a predetermined temperature. The temperature control comprises a cooling vehicle such as a heat exchanger, a coolant temperature sensor and control, a source of fluid coolant such as a manifold, a recirculating pump, a flow line to circulate the coolant to the workstation with the flow line containing a flow regulator and a heater, a bypass valve for bypassing the flow regulator and heater, and a workstation temperature sensor and control. The workstation temperature control controls the operation of the heater and bypass valve so that the temperature of the coolant is below the desired temperature for the workstation, thus achieving a rapid transient response while avoiding overcooling. The coolant temperature control and workstation temperature control may be in a temperature control computer, thus providing a large number of different operating sequences. A number of embodiments of workstations are also described.
REFERENCES:
patent: 3227207 (1966-01-01), Litman
patent: 3229754 (1966-01-01), Hoag
patent: 3236292 (1966-02-01), Smith, Jr.
patent: 3360032 (1967-12-01), Sherwood
patent: 3612165 (1971-10-01), Haynes
patent: 3645697 (1972-02-01), Hoffman, Jr.
patent: 4072181 (1978-02-01), Kostura et al.
patent: 4621678 (1986-11-01), Hahn et al.
patent: 4651813 (1987-03-01), Witt et al.
patent: 4729424 (1988-03-01), Mizuno et al.
patent: 4789025 (1988-12-01), Brandemuehl et al.
patent: 4984628 (1991-01-01), Uchida et al.
patent: 5226472 (1993-07-01), Benevelli et al.
patent: 5348076 (1994-09-01), Asakawa
"Polaris 2000 Microlithography Cluster" data sheet and drawings, FSI International (1994).
Sematech publication, "Chill plates", 4 pages (no date).
Reed William G.
Sloan Ben J.
Ford John K.
FSI International Inc.
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