Heat exchange – With retainer for removable article – Electrical component
Patent
1997-09-23
2000-03-07
Lazarus, Ira S.
Heat exchange
With retainer for removable article
Electrical component
165 801, 165 804, 156345, 118724, 118725, C23F 102
Patent
active
060327243
ABSTRACT:
A temperature control apparatus for a sample susceptor is described, the temperature control apparatus is easy to maintain, which can set a temperature in a wide range from a low temperature to a high temperature, which is compact and which does not require a special processing for disposing of a cooling medium.
A temperature control apparatus for a sample susceptor has a cooling unit for cooling a sample susceptor on which a wafer W is mounted, an electric heater for heating the sample susceptor, a temperature detecting unit for detecting the temperature of the sample susceptor, and a temperature adjusting unit for controlling the cooling unit and the heating unit based on a detection signal of the temperature detecting unit. The cooling unit has an electro-pneumatic regulator for generating a high-pressure gas of a predetermined pressure from a received gas and supplying the generated high-pressure gas by an electric control, and a vortex tube for generating a low-temperature gas based on a vortex flow generated by receiving a high-pressure gas in the tangent direction within the tube and for supplying this low-temperature gas, so that the low-temperature gas is supplied from the vortex tube to a gas flow path formed within the sample susceptor.
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Lazarus Ira S.
McKinnon Terrell
Tokyo Electron Limited
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