Temperature compensation of film bulk acoustic resonator...

Details Temperature compensation of film bulk acoustic resonator... Temperature compensation of film bulk acoustic resonator...

2008-03-18

2008-03-18

Dougherty, Thomas M. (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S363000

Reexamination Certificate

active

07345410

ABSTRACT:
A resonator. The resonator includes a bottom electrode overlaying at least part of a substrate, a composite structure overlaying at least part of the bottom electrode, and a top electrode overlaying at least part of the composite structure. The composite structure comprises a piezoelectric layer and a compensation layer, and the compensation layer includes silicon dioxide combined with boron.

REFERENCES:
patent: 5956292 (1999-09-01), Bernstein
patent: 2006/0035471 (2006-02-01), Hill et al.
patent: 58-137317 (1983-08-01), None
patent: 58-156220 (1983-09-01), None
patent: 11-58730 (1999-03-01), None
patent: 2066856 (1996-09-01), None

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