Coherent light generators – Particular temperature control
Patent
1993-07-16
1995-05-30
Lee, John D.
Coherent light generators
Particular temperature control
372 20, 372 29, H01S 313
Patent
active
054208777
ABSTRACT:
Temperature compensation method and apparatus for wave meters and tunable lasers controlled thereby which avoids the necessity of maintaining a good vacuum in the wave meter housing and which provides the quick establishment of wave length accuracy after laser turn on before temperature stability in the wave meter is reached. In accordance with the method, the wave meter housing is filled preferably with one atmosphere of dry nitrogen, and the wave meter output is corrected for temperature effects by combining the uncorrected or raw wave meter output with an appropriate wave meter temperature dependent component and an additional appropriate rate of change of wave meter temperature dependent component. The net result is the achievement of accuracy and stability in the wave meter output without use of an oven and before a steady state operating temperature is attained.
REFERENCES:
patent: 4683573 (1987-07-01), Albanese
patent: 4725854 (1988-02-01), Ohtsuka et al.
patent: 4792956 (1988-12-01), Kamin
patent: 5025445 (1991-06-01), Anderson et al.
patent: 5033114 (1991-07-01), Jayaraman et al.
Cymer Laser Technologies
Lee John D.
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