Temperature compensation mechanism for a micromechanical...

Details Temperature compensation mechanism for a micromechanical... Temperature compensation mechanism for a micromechanical...

2005-02-22

2005-02-22

Nguyen, Minh (Department: 2816)

Oscillators

Electromechanical resonator

C331S1160FE, C073S504040

Reexamination Certificate

active

06859113

ABSTRACT:
A time base including a resonator (4) and an integrated electronic circuit (3) for driving the resonator into oscillation and for producing, in response to the oscillation, a signal having a determined frequency. The resonator is an integrated micromechanical ring resonator supported above a substrate (2) and adapted to oscillate in a first oscillation mode. The ring resonator includes a free-standing oscillating structure (6). Electrodes (100, 120; 130, 150) are positioned under the free-standing oscillating structure in such a way as to drive and sense a second oscillation mode in a plane substantially perpendicular to the substrate and having a resonant frequency which is different from the resonant frequency of the first oscillation mode, a frequency difference between the resonant frequencies of both oscillation modes being used for compensating for the effect of temperature on the frequency of the signal produced by the time base.

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