Temperature compensation mechanism for a micromechanical...

Oscillators – Electromechanical resonator

Reexamination Certificate

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C331S1160FE, C073S504040

Reexamination Certificate

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06894576

ABSTRACT:
A time base including a resonator (4) and an integrated electronic circuit (3) for driving the resonator into oscillation and for producing, in response to the oscillation, a signal having a determined frequency. The resonator is an integrated micromechanical ring resonator supported above a substrate (2) and adapted to oscillate around an axis of rotation (O) substantially perpendicular to the substrate. The ring resonator includes a free-standing oscillating structure having a plurality of thermally compensating members (65) which are adapted to alter a mass moment of inertia of the free-standing oscillating structure as a function of temperature so as to compensate for the effect of temperature on the resonant frequency of the ring resonator.

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patent: 5856765 (1999-01-01), Hermann
patent: 6218915 (2001-04-01), Schallner

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