Temperature compensating pressure sensor having corrugated...

Details Temperature compensating pressure sensor having corrugated... Temperature compensating pressure sensor having corrugated...

2011-03-29

2011-03-29

Caputo, Lisa M (Department: 2855)

Measuring and testing

Fluid pressure gauge

With protective separator

C073S715000

Reexamination Certificate

active

07913567

ABSTRACT:
A temperature compensating pressure sensor comprises a substrate having sealed channels on which is deposited a CMOS layer; a conductive layer and a passivation layer deposited on the CMOS layer; a conductive active membrane spaced from the conductive layer to form an active chamber, the conductive active membrane having a corrugated cross section; a conductive reference membrane spaced from the conductive layer to form a reference chamber; and a cap which covers the membranes, said cap exposing the active membrane to an outside fluid pressure. The active membrane deflects due to differential stresses so that an active capacitance is developed between the active membrane and the conductive layer depending on the electrical permittivity e of the fluid, with the reference membrane providing a temperature compensating reference capacitance.

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Hitachi Ltd, Apr. 18, 2000.

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