Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2010-02-22
2011-10-25
Dougherty, Thomas M (Department: 2837)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S340000, C029S025350
Reexamination Certificate
active
08044553
ABSTRACT:
A SAW device having metal electrodes on a surface of the piezoelectric substrate includes a dielectric layer deposited on the surface. Depositing the layer results in seams extending upward from the electrodes extending above the surface of the substrate. An additional seam results from one seam extending from one electrode joining a second seam extending from an adjacent electrode within the dielectric layer and is generally formed above the height of the electrodes. The additional seam is removed through planarization or the like. The dielectric layer may be further planarized for providing a thickness of the dielectric layer above the electrodes as desired.
REFERENCES:
patent: 6864424 (2005-03-01), Mishima et al.
patent: 7209018 (2007-04-01), Nakao et al.
patent: 7224101 (2007-05-01), Mishima et al.
patent: 7230365 (2007-06-01), Nishiyama et al.
patent: 2006/0273687 (2006-12-01), Fujimoto et al.
patent: 2008/0182367 (2008-07-01), Petti
patent: 2009/0265904 (2009-10-01), Kando et al.
patent: 2009/0280584 (2009-11-01), Parekh
patent: 2010/0033055 (2010-02-01), Nakatani
patent: 200580202 (2005-03-01), None
patent: 2005150915 (2005-06-01), None
patent: 2004070946 (2004-08-01), None
patent: 2006114930 (2006-11-01), None
patent: 2008087836 (2008-07-01), None
Chen Alan S.
Daniel Timothy J.
Kook Taeho
Neston Stephen A.
Steiner Kurt G.
Allen Dyer Doppelt Milbrath & Gilchrist, P.A.
Dougherty Thomas M
Triquint Semiconductor, Inc.
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