Temperature compensated silicon carbide pressure transducer and

Details Temperature compensated silicon carbide pressure transducer and Temperature compensated silicon carbide pressure transducer and

1994-05-24

1996-08-27

Chilcot, Richard

Measuring and testing

Fluid pressure gauge

With pressure and/or temperature compensation

73777, G01L 1904, G01B 716

Patent

active

055490069

ABSTRACT:
A pressure transducer comprising a deflecting member fabricated from a semiconducting material having a first conductivity and a negative temperature coefficient of resistance, and four piezoresistive sensors fabricated from a semiconducting material having a second conductivity opposite to the first conductivity and a positive temperature coefficient of resistance, the sensors being disposed on a first surface of the deflecting member whereby the sensors are to be coupled to form a Wheatstone bridge configuration, and a temperature compensating resistor network fabricated from the semiconducting material of the first conductivity whereby when the resistor network is coupled to the sensors coupled in the Wheatstone bridge configuration, and a voltage placed across the bridge and the temperature compensating resistor network, an output is provided by the bridge which is independent of changes in temperature.

REFERENCES:
patent: 3800264 (1974-03-01), Kurtz et al.
patent: 3930823 (1976-01-01), Kurtz et al.
patent: 4320664 (1982-03-01), Rehn et al.
patent: 4994781 (1991-02-01), Sahagen
patent: 5165283 (1992-11-01), Kurtz et al.
patent: 5225126 (1993-07-01), Alles et al.
patent: 5231301 (1993-07-01), Peterson et al.
patent: 5259248 (1993-11-01), Ugai et al.

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