Metal working – Piezoelectric device making
Patent
1997-04-23
2000-10-17
Young, Lee
Metal working
Piezoelectric device making
29611, H04R 1710
Patent
active
061312568
ABSTRACT:
A temperature compensated resonator (15) and method for making the temperature compensated resonator (15). The temperature compensated resonator (15) has a substrate (110) including a cavity (120, 160) and a resonator layer (150). A bonding medium (159, 160) couples the substrate (110) to the resonator layer (150). The resonator layer (150) is bonded atop the cavity (120, 160). A conductor (215) is included on the resonator layer (150). The conductor (215) heats the resonator layer (150) in response to a current passing through the conductor (215).
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Dydyk Michael
Welling John Robert
Bogacz Frank J.
Fliegel Frederick M.
Limon Jeff D.
Motorola Inc.
Tugbang A. Dexter
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