Temperature compensated piezoresistive transducer

Details Temperature compensated piezoresistive transducer Temperature compensated piezoresistive transducer

1978-03-06

1979-08-28

Albritton, C. L.

Electrical resistors

Strain gauge type

With temperature compensation

338 5, G01L 122

Patent

active

041662695

ABSTRACT:
A temperature compensated piezoresistive transducer includes a silicon body having a major top surface and an under surface. The body has generally parallel spaced first and second elongate slots formed therein extending through said top and under surfaces to define a center portion between said slots and first and second outer portions at the outward edge of the respective slots. The center portion is adapted to receive pressure to be measured. The body has an additional slot extending through the top and bottom surfaces and extending around the first, second and center portions to define the outer periphery of a transducer membrane with portions of the body remaining to integrally support the membrane. Plural piezoresistive elements having elongate and transverse dimensions are formed on the membrane. The elements are arrayed to receive compressive and tensile stress when pressure is applied.

REFERENCES:
patent: 3697918 (1972-10-01), Orth et al.
patent: 4050049 (1977-09-01), Youmans
patent: 4071838 (1978-01-01), Block

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